Cronus

Description

Cronus is a shielded semiautomatic protestation designed to achieve an exceptionally low noise floor for precise low-level voltage, current, and capacitance measurements. It features independently translating microscopes and sample chuck components, along with a platen stage that supports up to six kelvin-compatible micro positioners for contacting patterns on a sample surface. The temperature-controlled sample chuck operates from −60°C to 300°C, enabling a wide range of testing conditions. Integrated intelligent image recognition and wafer mapping allow automated measurements across lithographically patterned devices. The system is paired with the Keysight B1500A parameter analyzer, which includes multiple measurement modules and a switch matrix for seamless transitions between I/V and C/V measurements without recabling. User interaction is managed through the Easy Expert GUI, and the WGFMU module enables high-speed waveform generation with synchronized current/voltage measurements for advanced IV characterization.

Capabilities

Probestation

• Wafer compatibility (up to 200 mm / 8 in) – Supports standard wafer sizes 
• Temperature-controlled chuck (−60°C to 300°C) – Enables measurements across a wide thermal range with air cooling 
• MicroChamber enclosure – Provides dark, dry conditions with enhanced EMI shielding 
• Up to 6 micropositioners – Supports multiple kelvin-compatible probes for simultaneous контакting 
• Precision 4-axis motorized stage – Allows accurate positioning and alignment 

Stages

• XY stage (203 × 203 mm travel) – Large-area movement with 1 µm resolution and ≤2 µm repeatability 
• Z stage (5 mm travel) – Fine vertical positioning with 1 µm resolution and ≤1 µm repeatability 
• Theta stage (±5.5°) – Enables angular adjustment for alignment 

Measurement Performance

• Ultra-low noise floor (≤ −170 dBVrms/√Hz) – Supports highly sensitive electrical measurements 
• Low AC noise (≤ 5 mVp-p) – Improves signal integrity for precision testing  

Semiconductor Analyzer (Keysight B1500A modules)

• MFCMU (B1520A) – Multi-frequency capacitance measurements from 1 kHz to 5 MHz with high accuracy 
• HRSMU (B1517A) – High-resolution source/monitor unit for low-current measurements (pA range) 
• HPSMU (B1510A) – High-power source/monitor unit for high-voltage/current applications 
• WGFMU (B1530A) – Waveform generator with synchronized fast I/V measurements and high-speed characterization 

Advanced Measurement Features

• Automatic wafer mapping and image recognition – Enables automated, site-specific measurements 
• Switch matrix integration – Allows seamless switching between I/V and C/V without recabling 
• Wide parameter measurement support – Includes capacitance (Cp, Cs), resistance, impedance, admittance, and more 
• High-frequency and high-speed capability – Supports sampling up to 200 MSa/s with nanosecond timing resolution 
• Arbitrary waveform generation – Enables DC, AC, and complex waveform testing with synchronized measurement 
• High-resolution biasing and output control – Provides precise voltage/current sourcing for detailed device characterization