Surface Profilometer

Description

The DektakXT® stylus surface profiler is an advanced thin and thick film step height measurement tool. In addition to profiling surface topography and waviness, the DektakXT system measures roughness in the nanometer range. It provides a step-height repeatability of 5Å. Automatic X-Y and theta stage allow 2D scans as well as 3D mapping.

Capabilities

• Max Sample Diameter                      200mm
• Max sample thickness                      50mm
• Max/min scan length                        55mm
• Z Range/bit Resolution Options
  • 6.5um/0.1nm
  • 65um/1nm
  • 524um/8nm
  • 1mm/15nm
• Stylus force                                           1-15mg
• Tip radius                                              2 um