FILMETRICS Optical Profiler

Description

The Filmetrics Profilm3D Optical Profiler is a non-contact surface metrology system that uses advanced interferometry techniques—such as white light interferometry (WLI) and phase shifting interferometry (PSI)—to generate high-resolution 3D surface measurements. It enables precise characterization of surface topography, including step height, roughness, and feature dimensions, across a wide range of materials from smooth optical surfaces to rough, complex structures. The system integrates automated stage control, high-resolution imaging, and intuitive software for data acquisition, analysis, and visualization, making it suitable for applications in semiconductors, materials science, optics, and biomedical research. 

Capabilities

• Non-contact 3D surface profiling – Uses interferometry to measure surface features without damaging samples
• Multiple measurement modes (WLI, PSI, enhanced roughness) – Enables analysis of both smooth and rough surfaces with high precision 
• High vertical resolution (nanometer scale) – Provides repeatable and accurate surface measurements
• Automated XY stage – Supports large-area scanning and precise positioning (up to 200 mm travel depending on configuration) 
• Automated focus and piezo Z control – Ensures accurate height measurements and efficient scanning
• Wide measurement range – Capable of measuring thicknesses from nanometers to millimeters
• Step height measurement – Quantifies vertical differences between surface features
• Surface roughness analysis (area and line) – Calculates parameters such as Sa and Sq using industry standards 
• Dimensional analysis tools – Measures distances, feature sizes, and spatial relationships
• Volume and particle analysis – Evaluates material buildup, voids, and grain structures 
• 3D imaging and true-color visualization – Produces detailed surface maps and enhanced image representation 
• Stitching capability – Combines multiple scans to create large-area surface maps 
• Advanced data processing tools – Includes leveling, filtering, outlier removal, and interpolation for accurate analysis 
• Data export options (CSV, STL, images) – Supports further analysis and 3D modeling
• User-friendly software interface – Enables automated workflows and customizable analysis recipes