Description
The Scios 2 DualBeam is a high-resolution Focused Ion Beam Scanning Electron Microscope (FIB-SEM) designed for advanced material research, site-specific analysis, and sample preparation. It integrates a Gallium (Ga+) Ion column with an ultra-high-resolution electron column to allow for simultaneous imaging and precise material removal. When equipped with the Pathfinder EDS system, the DualBeam transforms into a powerful analytical workstation capable of providing real-time chemical characterization alongside structural imaging. This synergy allows users to navigate to micro-scale features with the electron beam, cross-section them using the ion beam, and immediately map the elemental distribution of the exposed internal surfaces.
Capabilities
Simultaneous Dual-Beam Operation – Integrates a Field Emission Scanning Electron Microscope (FE-SEM) for high-resolution imaging with a Focused Ion Beam (FIB) for precision milling and cross-sectioning.
Site-Specific Elemental Analysis – Uses Pathfinder EDS to identify and quantify chemical compositions (Oxygen to Uranium) at the exact location of FIB-milled features.
Advanced Spectral Imaging (Mapping) – Generates high-definition elemental maps that can be overlaid onto SEM images to visualize chemical gradients and phase distributions.
Integrated Micro-navigation – Allows for seamless switching between structural imaging and EDS "Point ID" or "Line Scan" modes to analyze fibers, precipitates, or layered interfaces.
Real-Time Compositional Monitoring – Monitors elemental data during the analysis process with adjustable time constants to maintain optimal dead time (<30%) for accurate quantification.
3D Chemical Characterization – Enables the correlation of topographic data from the DualBeam with chemical data from Pathfinder to understand complex 3D material structures.
Automated Feature Identification – Utilizes "Auto ID" software logic to rapidly identify unknown elements within a spectrum, reducing manual peak assignment.
Comprehensive Data Export – Streamlines the transition from analysis to documentation with one-click reporting into Microsoft Word and PowerPoint, capturing both SEM imagery and EDS spectra.
Flexible Sample Handling – Supports a wide variety of materials including semiconductors, metals, and geological samples for both surface and subsurface analysis.