XRD

Description

The Rigaku SmartLab X-ray Diffractometer (XRD) is an advanced system used to analyze the crystalline structure of materials. It enables detailed characterization of thin films and powder samples, providing information on thickness, composition, strain, relaxation, density, roughness, phase, crystalline texture, percent crystallinity, and grain or pore size. The system features intelligent software that guides users through data acquisition and analysis, along with specialized hardware for expanded measurement capabilities, including mapping, high-temperature studies, and small-angle scattering.

Capabilities

  • Comprehensive structural analysis – Determines phase, crystallinity, strain, texture, and composition 
  • Thin film and powder analysis – Supports a wide range of material types 
  • Thickness and density measurement – Evaluates film properties and uniformity 
  • Crystalline texture and grain size analysis – Provides microstructural information 
  • Maximum sample size (150 mm wafer) – Accommodates standard wafer formats 
  • Maximum sample thickness (3.5 mm) – Supports bulk and layered samples 
  • X-Y stage mapping – Enables spatial analysis and uniformity studies across samples 
  • Small-angle X-ray scattering (SAXS) vacuum path – Supports nanoscale structural characterization 
  • High-temperature domed stage (up to 1100°C) – Allows in-situ thermal analysis 
  • 2D detector – Enhances data collection speed and diffraction pattern analysis 
  • User-guided software – Streamlines setup, acquisition, and data interpretation

Location: RFM 1202
Model: Rigaku SmartLab
Generously funded by the U.S. Department of Defense Army Research Office
W911NF-15-1-0025 (HBCU/MI).
Program Manager Patricia A. Huff
Principal Investigator: Dr. Mark Holtz